AIX 2800 G4 STAR
Product Description
MOCVD process related quartz components
Octagonal STAR
11-degree sun disk
2"4"QUARTZ WAFER
QUARTZ BOAT
TRANSFER ARM
LOCK SCREW RING
SUPPORTING PIN
SUPPORTING TUBE
BANANA
TENSION DISK
STAR RING
SUPPORT QUARTZ
WINDOW QUARTZ
NOZZLE HOLDER
SLEEVE TUBE
CEILING
SIC TRAY
Plasma ICP crack-related quartz tray
21 hole LTRAY. 19 hole LTRAY
PIN TYPE four-jaw PIN TYPE five claws
Can be processed according to customer requirements